Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Andrei Sabac; Christophe Gorecki; Michal Jozwik; Thierry Dean; Alain Jacobelli

doi:10.1117/12.546299

17 August 2004 Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Andrei Sabac, Christophe Gorecki, Michal Jozwik, Thierry Dean, Alain Jacobelli

Author Affiliations +

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.546299
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will allow the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated with the piezoelectric (PZT) actuated membrane.

Citation Download Citation

Andrei Sabac, Christophe Gorecki, Michal Jozwik, Thierry Dean, and Alain Jacobelli "Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.546299

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