Paper
11 October 2004 High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy
Michael P. Kowalski, Raymond G. Cruddace, Troy W. Barbee Jr., William R. Hunter, Klaus F. Heidemann, Bruno Nelles, Ralf Lenke, Holger Kierey
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Abstract
We have measured the topography and near-normal incidence EUV efficiency of five flat multilayer-coated polymer-overcoated blazed ion-etched holographic test gratings. Blaze angles were in the range 2.0-4.1°. All gratings had a surface roughness <3 Å rms (20-4000 Å). The best grating had a measured efficiency of 29.9% in the second order at 157.9 Å and a derived groove efficiency of 53.0%. At the shortest wavelength investigated (100.0 Å) another grating produced a measured efficiency in the first order of 12.9% and a derived groove efficiency of 33.6%. In third order another grating produced a measured efficiency at 137.8 Å of 13.4% and a derived groove efficiency of 21.8%. To the best of our knowledge these values exceed previous published results. Some issues remain that may be associated with modification of the groove profile by the multilayer coating.
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Michael P. Kowalski, Raymond G. Cruddace, Troy W. Barbee Jr., William R. Hunter, Klaus F. Heidemann, Bruno Nelles, Ralf Lenke, and Holger Kierey "High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy", Proc. SPIE 5488, UV and Gamma-Ray Space Telescope Systems, (11 October 2004); https://doi.org/10.1117/12.551304
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Cited by 6 scholarly publications.
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KEYWORDS
Multilayers

Reflectivity

Coating

Extreme ultraviolet

Polymers

Diffraction gratings

Holography

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