Nanotomography using parabolic refractive x-ray lenses

Christian G. Schroer; Boris M. Benner; Til Florian Gunzler; Marion Kuhlmann; Jens Patommel; Bruno Lengeler; Andrea Somogyi; Timm Weitkamp; Christoph Rau; Anatoly A. Snigirev; Irina I. Snigireva

doi:10.1117/12.559643

26 October 2004 Nanotomography using parabolic refractive x-ray lenses

Christian G. Schroer, Boris M. Benner, Til Florian Gunzler, Marion Kuhlmann, Jens Patommel, Bruno Lengeler, Andrea Somogyi, Timm Weitkamp, Christoph Rau, Anatoly A. Snigirev, Irina I. Snigireva

Author Affiliations +

Proceedings Volume 5535, Developments in X-Ray Tomography IV; (2004) https://doi.org/10.1117/12.559643
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

In recent years, hard x-ray full field microscopy and tomography has been developed for synchrotron radiation sources based on parabolic refractive x-ray lenses. These optics are used as objective lens in a hard x-ray microscope that can image objects in transmission free of distortion. Using beryllium as lens material, an optical resolution of about 100nm has been reached in a field of view that is larger than 500 micrometers. In the future, the spatial resolution may be improved to below 50nm. Recording a large number of micrographs from different perspectives allows one to reconstruct non-destructively the 3-dimensional inner structure of an object with resolutions well below one micrometer. Different contrast mechanisms can be exploited, such as absorption and near field phase contrast. The method is demonstrated using a microchip as a test sample.

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Christian G. Schroer, Boris M. Benner, Til Florian Gunzler, Marion Kuhlmann, Jens Patommel, Bruno Lengeler, Andrea Somogyi, Timm Weitkamp, Christoph Rau, Anatoly A. Snigirev, and Irina I. Snigireva "Nanotomography using parabolic refractive x-ray lenses", Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); https://doi.org/10.1117/12.559643

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