The phase transition analysis of the vanadium dioxide film prepared by ion-beam-enhanced deposition method

Ningyi Yuan; Jinhua Li; Ge Li

doi:10.1117/12.561406

22 October 2004 The phase transition analysis of the vanadium dioxide film prepared by ion-beam-enhanced deposition method

Ningyi Yuan, Jinhua Li, Ge Li

Author Affiliations +

Proceedings Volume 5564, Infrared Detector Materials and Devices; (2004) https://doi.org/10.1117/12.561406
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The phase transition characteristic of the vanadium dioxide (VO2) film prepared by ion beam enhanced deposition (IBED) method was studied. The lattice distortion hypothesis was supposed to simulate resistance change of the VO₂ polycrystalline film with temperature increasing and the simulation result was explained based on Landau theory. Due to the present of argon atom in interstitial site of VO₂ lattice or grain boundary, the semiconductor- to-metal phase transition began at 48°C in some grains, obviously lower than the phase transition temperature of VO₂ single crystal.

Citation Download Citation

Ningyi Yuan, Jinhua Li, and Ge Li "The phase transition analysis of the vanadium dioxide film prepared by ion-beam-enhanced deposition method", Proc. SPIE 5564, Infrared Detector Materials and Devices, (22 October 2004); https://doi.org/10.1117/12.561406

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available