Near-field enhanced laser-assisted deposition

Jing Shi; Yongfeng Lu; Xiaoyu Chen; R. S. Cherukuri; Kiran K. Mendu; Nagaraj Batta

doi:10.1117/12.591120

12 April 2005 Near-field enhanced laser-assisted deposition

Jing Shi, Yongfeng Lu, Xiaoyu Chen, R. S. Cherukuri, Kiran K. Mendu, Nagaraj Batta

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.591120
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Diamond-like carbon (DLC) coated tips have been successfully applied in field emitter arrays, and scanning probe microscope (SPM) based nanofabrications. DLC deposition on tips is conventionally realized by thermal and plasma-enhanced chemical vapor deposition processes. In this study, we use laser-assisted method employing strongly enhanced near field around the tip apex for DLC deposition. DLC films were deposited on tungsten (W) tips under KrF excimer laser irradiation in a benzene solution and in a laser chemical vapor deposition (LCVD) chamber. Simulation results showed a highly localized optical field enhancement at the tip apex. There was also an optical-field gradient from apex to tip body. Experiment results showed that a locally confined DLC film was deposited based on energy dispersive X-ray (EDX) analysis. Raman spectra showed that at positions close to apexes, films tend to be more diamond-like. This implies that quality of DLC film varies according to local optical intensity along the tip. Hence, the deposition process was confirmed to be induced by the local near field generated by laser and nanotip interaction.

Citation Download Citation

Jing Shi, Yongfeng Lu, Xiaoyu Chen, R. S. Cherukuri, Kiran K. Mendu, and Nagaraj Batta "Near-field enhanced laser-assisted deposition", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.591120

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