Plasma-implantation-based surface modification of metals with single-implantation mode

X. B. Tian; J. T. Cui; S. Q. Yang; Ricky K. Y. Fu; Paul K. Chu

doi:10.1117/12.607376

8 December 2004 Plasma-implantation-based surface modification of metals with single-implantation mode

X. B. Tian, J. T. Cui, S. Q. Yang, Ricky K. Y. Fu, Paul K. Chu

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607376
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

Citation Download Citation

X. B. Tian, J. T. Cui, S. Q. Yang, Ricky K. Y. Fu, and Paul K. Chu "Plasma-implantation-based surface modification of metals with single-implantation mode", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607376

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