SWCNT aggregates for gas sensing applications

M. Lucci; P. Regoliosi; A. Reale; A. Di Carlo; E. Tamburri; S. Orlanducci; M. L. Terranova; P. Lugli

doi:10.1117/12.609292

28 June 2005 SWCNT aggregates for gas sensing applications

M. Lucci, P. Regoliosi, A. Reale, A. Di Carlo, E. Tamburri, S. Orlanducci, M. L. Terranova, P. Lugli

Proceedings Volume 5838, Nanotechnology II; (2005) https://doi.org/10.1117/12.609292
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

In the present research, purified commercially SWCNTs are used as gas sensing material in an interdigitated electrode platform for NH₃, NO_x and H₂O detection. The SWCNT response to gas absorption is known to be dependent from different parameters and operational conditions, such as the relative orientation of the nanotubes and their organization between the electrodes, the temperature of the sensor, and moreover the voltage applied to a back gate contact. We show the sensor response for the various gas species considered and we analyze the sensor behavior with respect to the sensibility and to the detection velocity. Moreover we studied the effect on absorption/desorption gas processes by applying a gate voltage to the Si substrate beneath the interdigitated electrodes. The results indicate that the acceleration of the time response of the sensor for the detection of NH₃ is proportional to the gate voltage in the range 0 V - 40 V.

Citation Download Citation

M. Lucci, P. Regoliosi, A. Reale, A. Di Carlo, E. Tamburri, S. Orlanducci, M. L. Terranova, and P. Lugli "SWCNT aggregates for gas sensing applications", Proc. SPIE 5838, Nanotechnology II, (28 June 2005); https://doi.org/10.1117/12.609292

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