MEMS tip/tilt and piston mirror arrays as diffractive optical elements

Roland Ryf; Howard R. Stuart; C. Randy Giles

doi:10.1117/12.620566

30 August 2005 MEMS tip/tilt and piston mirror arrays as diffractive optical elements

Roland Ryf, Howard R. Stuart, C. Randy Giles

Proceedings Volume 5894, Advanced Wavefront Control: Methods, Devices, and Applications III; 58940C (2005) https://doi.org/10.1117/12.620566
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We present an analytic evaluation of the optical performance of a tip/tilt and piston Spatial Light Modulator, for use in adaptive optic and beam steering applications. The impact of array fill factor, pixel curvature, position and tilt accuracy, and pixel yield are discussed in detail. Two arrangements for beam steering are presented and analyzed; in the first the SLM is used as a programmable higher-order diffraction grating, and in the second the SLM acts as a programmable Fresnel lens inside a telescope.

Citation Download Citation

Roland Ryf, Howard R. Stuart, and C. Randy Giles "MEMS tip/tilt and piston mirror arrays as diffractive optical elements", Proc. SPIE 5894, Advanced Wavefront Control: Methods, Devices, and Applications III, 58940C (30 August 2005); https://doi.org/10.1117/12.620566

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available