Nanometer-scale imaging with compact soft x-ray lasers

Fernando Brizuela; Georgiy Vaschenko; Courtney Brewer; Michael Grisham; Carmen S. Menoni; Hector Mancini; Mario C. Marconi; Jorge J. Rocca; Weilun Chao; J. Alexander Liddle; Erik H. Anderson; David T. Attwood; Alexander V. Vinogradov; Igor A. Artioukov; Yuriy P. Pershyn; Valeriy V. Kondratenko

doi:10.1117/12.614646

13 September 2005 Nanometer-scale imaging with compact soft x-ray lasers

Fernando Brizuela, Georgiy Vaschenko, Courtney Brewer, Michael Grisham, Carmen S. Menoni, Hector Mancini, Mario C. Marconi, Jorge J. Rocca, Weilun Chao, J. Alexander Liddle, Erik H. Anderson, David T. Attwood, Alexander V. Vinogradov, Igor A. Artioukov, Yuriy P. Pershyn, Valeriy V. Kondratenko

Author Affiliations +

Proceedings Volume 5919, Soft X-Ray Lasers and Applications VI; 59190N (2005) https://doi.org/10.1117/12.614646
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We have demonstrated imaging at soft x-ray wavelengths in transmission and reflection modes using high repetition rate table-top soft x-ray lasers. Transmission mode imaging with a resolution better than 50 nm was demonstrated using the output from a 13.9 nm Ni-like Ag laser in combination with condenser and objective Fresnel zone plate optics. Reflection mode imaging of a microelectronic chip with a resolution of 120-150 nm was demonstrated using the illumination provided by the 46.9 nm output from a compact capillary-discharge Ne-like Ar laser. This microscope combines a Schwarzschild condenser and a zone plate objective. The results demonstrate the feasibility of practical nanometer-scale microscopy with compact soft-x-ray laser sources.

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Fernando Brizuela, Georgiy Vaschenko, Courtney Brewer, Michael Grisham, Carmen S. Menoni, Hector Mancini, Mario C. Marconi, Jorge J. Rocca, Weilun Chao, J. Alexander Liddle, Erik H. Anderson, David T. Attwood, Alexander V. Vinogradov, Igor A. Artioukov, Yuriy P. Pershyn, and Valeriy V. Kondratenko "Nanometer-scale imaging with compact soft x-ray lasers", Proc. SPIE 5919, Soft X-Ray Lasers and Applications VI, 59190N (13 September 2005); https://doi.org/10.1117/12.614646

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