Use of non-digitized diffractive optical elements for high-throughput and damage-free laser materials processing

Jun Amako; Eiichi Fujii; Yutaka Yamazaki; Tatsuya Shimoda

doi:10.1117/12.644440

23 February 2006 Use of non-digitized diffractive optical elements for high-throughput and damage-free laser materials processing

Jun Amako, Eiichi Fujii, Yutaka Yamazaki, Tatsuya Shimoda

Author Affiliations +

Proceedings Volume 6107, Laser-based Micropackaging; 61070D (2006) https://doi.org/10.1117/12.644440
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

As a means to accomplish high-throughput and damage-free processes, non-digitized diffractive beam splitters are effectual: they can afford to fully suppress undesired diffraction beams by containing as much light energy as possible in a fan-out of beams meant for the process. The surface-relief structures of the splitters are designed using a Fourier- iterative algorithm and are formed on high-quality fused silica substrates using direct laser writing and reactive ion etching. For a 13-beam splitter, for example, a non-digitized element gives an efficiency of 97% with SN=38, whereas a binary counterpart is as efficient as 78% with SN=5, where SN is defined as the ratio between the minimum of the fanout beam intensities and the maximum of higher-order diffraction intensities. We have tested these two types of elements in laser-cutting experiments and verified that the non-digitized element is far superior to the binary element.

Citation Download Citation

Jun Amako, Eiichi Fujii, Yutaka Yamazaki, and Tatsuya Shimoda "Use of non-digitized diffractive optical elements for high-throughput and damage-free laser materials processing", Proc. SPIE 6107, Laser-based Micropackaging, 61070D (23 February 2006); https://doi.org/10.1117/12.644440

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