Paper
9 February 2006 Optically driven microtools fabricated by UV lithography and RIE
Peter John Rodrigo, Lauge Gammelgaard, Peter Bøggild, Ivan R. Perch-Nielsen, Jesper Glückstad
Author Affiliations +
Abstract
We demonstrate the use of multiple optical traps for driving various microfabricated silica structures in liquid host medium. Multiple counterpropagating-beam traps are formed using a generalized phase contrast (GPC) -based optical trapping system. A combination of UV-lithography and reactive-ion etching (RIE) is employed to fabricate the microtools whose design includes having multiple appendages with rounded endings by which optical traps hold and actuate them. Experiments show the collective and user-coordinated utility of multiple beams for driving microstructured objects whose future integration may lead to optically controlled micromachineries.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter John Rodrigo, Lauge Gammelgaard, Peter Bøggild, Ivan R. Perch-Nielsen, and Jesper Glückstad "Optically driven microtools fabricated by UV lithography and RIE", Proc. SPIE 6131, Nanomanipulation with Light II, 61310C (9 February 2006); https://doi.org/10.1117/12.646469
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Optical tweezers

Reactive ion etching

Microfabrication

UV optics

Etching

Liquids

Phase contrast

RELATED CONTENT


Back to Top