A self-consistent model for the HCl dc glow discharge: plasma parameters and active particles kinetics

A. M. Efremov; V. I. Svettsov

doi:10.1117/12.677019

10 June 2006 A self-consistent model for the HCl dc glow discharge: plasma parameters and active particles kinetics

A. M. Efremov, V. I. Svettsov

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 626009 (2006) https://doi.org/10.1117/12.677019
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

In this work, the investigations of plasma parameters and active particles kinetics in an HCl dc glow discharge were carried out using the combination of plasma diagnostics and plasma modeling. The modeling was based on the self-consistent solution of Boltzmann kinetic equation and the balance equation of chemical kinetic for neutral and charged particles. It was shown that the electron impact dissociation of HCl is the main source of both Cl and H atoms while the total balances for all kinds of neutral particles are noticeably influenced by the volume atom-molecular reactions. The population of the vibrational energy levels for HCl molecules was found to be low, but the role of the HCl_v>0 in the negative ions formation process cannot be neglected. The assumption of the first-order heterogeneous recombination kinetics for both Cl and H species provides a good agreement between the modeling and plasma diagnostics data.

Citation Download Citation

A. M. Efremov and V. I. Svettsov "A self-consistent model for the HCl dc glow discharge: plasma parameters and active particles kinetics", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626009 (10 June 2006); https://doi.org/10.1117/12.677019

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