A method for the calibration of step gauges

Hao Yan; Wuyi Wang

doi:10.1117/12.716185

13 October 2006 A method for the calibration of step gauges

Hao Yan, Wuyi Wang

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800S (2006) https://doi.org/10.1117/12.716185
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

To calibrate step gauges, a new linear measuring system was improved in our laboratory that combines the Leitz universal measuring machine of the 1960s with a laser interferometer. This paper introduces the measurement method and the calculation of the expanded uncertainty of the measurement. The expanded uncertainty of the system is (0.3 + L) μm at k=2, where L is given in meter.

Citation Download Citation

Hao Yan and Wuyi Wang "A method for the calibration of step gauges", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800S (13 October 2006); https://doi.org/10.1117/12.716185

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available