Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor

Jun Xu; Rongqiang Chi; Bo You; Xin Li; Haiying Wang; Hong Ai

doi:10.1117/12.716148

25 October 2006 Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor

Jun Xu, Rongqiang Chi, Bo You, Xin Li, Haiying Wang, Hong Ai

Author Affiliations +

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801B (2006) https://doi.org/10.1117/12.716148
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The miniature frequency-temperature sensor based on quartz tuning fork resonators with a new ZYtw-cut and vibrating in the flexural mode has been described. The resonance frequency of a quartz tuning fork crystal was comprehensively analyzed by an analytical method, Sezawa's approximations and the finite element method. The influence of the sensor structural dimension on the resonant frequency and structural modes is investigated, which offers reliable basis for the structure design tuning fork geometry, tine electrode pattern and thickness of the micro quartz crystal tuning fork temperature sensor. The validity of calculated and simulated results is experimentally confirmed. The experimental results has shown that this new type of sensor with sensitivity about 0.001 degree C and accuracies 0.05 degree C within temperature range from -50 degree C to 200 degree C.

Citation Download Citation

Jun Xu, Rongqiang Chi, Bo You, Xin Li, Haiying Wang, and Hong Ai "Design, modeling, and simulation of quartz-crystal-tuning-fork-resonators-based micro temperature sensor", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801B (25 October 2006); https://doi.org/10.1117/12.716148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Quartz

Resonators

Temperature sensors

Crystals

Sensors

Electrodes

Finite element methods

Show All Keywords

Keywords/Phrases

Search In:

Publication Years