Surface faults evaluation by optical imaging method for electropolishing process

Shuo-Jen Lee; Jing-Jang Lai; Dar-Yuan Chang

doi:10.1117/12.716328

13 October 2006 Surface faults evaluation by optical imaging method for electropolishing process

Shuo-Jen Lee, Jing-Jang Lai, Dar-Yuan Chang

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628026 (2006) https://doi.org/10.1117/12.716328
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The electropolishing process is a surface treatment technology which results in smooth and shining surface and high corrosion resistance film. Methodology of evaluating the surface quality is important in finding the optimal process parameters. In this paper, an evaluation method by using optical imaging method is proposed to characterize and evaluate the surface faults. The results demonstrate the optical images are more sensitive in characterizing surface topology. The variation in the calculated ratio of the faulted surface area is sharper then the value of surface roughness.

Citation Download Citation

Shuo-Jen Lee, Jing-Jang Lai, and Dar-Yuan Chang "Surface faults evaluation by optical imaging method for electropolishing process", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628026 (13 October 2006); https://doi.org/10.1117/12.716328

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