Polysilicon comb micro-accelerometer system design and FEM simulation

Fengli Liu; Lianxing Gao; Yongping Hao; Pengfei Zeng

doi:10.1117/12.717487

28 October 2006 Polysilicon comb micro-accelerometer system design and FEM simulation

Fengli Liu, Lianxing Gao, Yongping Hao, Pengfei Zeng

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 635803 (2006) https://doi.org/10.1117/12.717487
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

Polysilicon Comb Micro-accelerometer is one of the most common MEMS (MicroElectroMechanical System) devices. In the comb micro-accelerometer design, the parameters of the folded beams are key factors to improve the performance and ensure the reliability. In the system design of CoventorWare, the width and length of the folded beams are varied and the corresponding resonant frequencies and mechanical behaviors are respectively discussed. The optimized parameters can be obtained and varied from the FEM analysis. The optimized results ensure that the frequency of the detect mode is lower than the other mode's frequencies, so the coupling error are small. The performance of the micro-accelerometer is improved and reliability should be ensured. The micro-accelerometer is sensitive to electrostatic power, which deforms its geometric structure that causes lower function. Through DC Transfer analysis, the pull-in voltage is checked and the whole system reliability is ensured by corresponding electrostatic spring softening analysis.

Citation Download Citation

Fengli Liu, Lianxing Gao, Yongping Hao, and Pengfei Zeng "Polysilicon comb micro-accelerometer system design and FEM simulation", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635803 (28 October 2006); https://doi.org/10.1117/12.717487

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