Theory of chromatic sensor for topography measurements

Antonín Mikš; Jiří Novák; Pavel Novák

doi:10.1117/12.739529

12 April 2007 Theory of chromatic sensor for topography measurements

Proceedings Volume 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; 66090U (2007) https://doi.org/10.1117/12.739529
Event: 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 2006, Liberec, Czech Republic

Abstract

The problems of topography of surfaces are very important in various parts of science and engineering. Several approaches exist for measurement of surface figure and roughness. Measurement methods can be divided into two distinct categories, contact and non-contact techniques. Our work describes a relatively simple method for topography measurements that uses special optical systems (hyperchromats) with a linear dependence of longitudinal chromatic aberration on the wavelength of light. The aim of this work is to show a possible application of hyperchromatic optical systems for topography of surfaces. The work describes the theory for calculation of design parameters of hyperchromats, i.e. optical systems with large longitudinal chromatic aberration that is in our case linearly dependent on the wavelength of light. On the basis of the performed analysis, such optical systems (chromatic sensors) can be designed that permit to perform measurements of topography of surfaces, i.e. determine a figure or roughness of surfaces. The described theory makes possible to design the chromatic sensor with the required measurement accuracy and dynamic range. The sensor uses polychromatic light and relatively simple experimental arrangement. The proposed measurement technique seems to be quite simple and cost effective with respect to other measurement methods.

Citation Download Citation

Antonín Mikš, Jiří Novák, and Pavel Novák "Theory of chromatic sensor for topography measurements", Proc. SPIE 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 66090U (12 April 2007); https://doi.org/10.1117/12.739529

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