Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet

S. V. Bobashev; I. V. Domracheva; M. V. Petrenko; G. K. Tumakaev; Z. A. Stepanova

doi:10.1117/12.740210

15 May 2007 Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet

S. V. Bobashev, I. V. Domracheva, M. V. Petrenko, G. K. Tumakaev, Z. A. Stepanova

Proceedings Volume 6614, Laser Optics 2006: Superintense Light Fields and Ultrafast Processes; 66140D (2007) https://doi.org/10.1117/12.740210
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation

Abstract

Development of highly effective debris free EUV (extreme ultraviolet) radiation source is an actual problem today. Experimental results on EUV output from the source based on laser-produced plasma in supersonic Xe jet have been obtained. The conversion efficiency is 0.08% at a wavelength of 13.5 nm (Δλ = 0.35 nm, 2π sterrad). The methods of optimization of gas-jet converter have been determined. Measurements of EUV radiation energy dependence on the laser energy and the target material (solid-state Cu, Mo, W, Ta and supersonic Xe jet) have been made. The conversion efficiency of laser-produced plasma (CELPP) has been determined and the experimental values have been obtained for different materials of the target.

Citation Download Citation

S. V. Bobashev, I. V. Domracheva, M. V. Petrenko, G. K. Tumakaev, and Z. A. Stepanova "Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet", Proc. SPIE 6614, Laser Optics 2006: Superintense Light Fields and Ultrafast Processes, 66140D (15 May 2007); https://doi.org/10.1117/12.740210

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