Optical scan method for fine surface roughness measurement

Zhengping Wang; Lihui Wang

doi:10.1117/12.723727

18 June 2007 Optical scan method for fine surface roughness measurement

Zhengping Wang, Lihui Wang

Author Affiliations +

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162K (2007) https://doi.org/10.1117/12.723727
Event: Optical Metrology, 2007, Munich, Germany

Abstract

A method is proposed for smooth surface roughness measurement. Two standard reference surfaces and two polaroids are employed to realize the measurement. The reversibility of the optical beam is overcome by using two quarter-wave plates. Measuring optical set-up is shown. The mathematical expression of the working principle of the method is derived. The uncertainty of the method is theoretically calculated and digitally simulated. Finally, the feasibility of this method is verified by measuring a standard roughness sample. The measurement result is in accordance with the standard value of the sample roughness provided by the manufacturer.

Citation Download Citation

Zhengping Wang and Lihui Wang "Optical scan method for fine surface roughness measurement", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162K (18 June 2007); https://doi.org/10.1117/12.723727

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE