Paper
25 September 2007 Nanoscale fabrication of a plasmonic dimple lens for nano-focusing of light
Shantha Vedantam, Hyojune Lee, Japeck Tang, Josh Conway, Matteo Staffaroni, Jesse Lu, Eli Yablonovitch
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Abstract
The extent to which light can be focused with conventional optics is limited to λ/2 by the phenomenon of diffraction. Optical energy needs to be focused to less than 100nm to enable improvement and innovation in nanoscale applications. A novel lens structure to focus surface plasmons to a few tens of nanometer with high throughput is described here. This paper outlines the theoretical design and fabrication considerations of this novel plasmonic lens structure.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shantha Vedantam, Hyojune Lee, Japeck Tang, Josh Conway, Matteo Staffaroni, Jesse Lu, and Eli Yablonovitch "Nanoscale fabrication of a plasmonic dimple lens for nano-focusing of light", Proc. SPIE 6641, Plasmonics: Metallic Nanostructures and Their Optical Properties V, 66411J (25 September 2007); https://doi.org/10.1117/12.735462
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CITATIONS
Cited by 6 scholarly publications and 1 patent.
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KEYWORDS
Plasmonics

Silicon

Dielectrics

Etching

Polishing

Silver

Epoxies

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