Applied research on four-quadrant optoelectronic detector for surface topography measurement

Shuzhen Wang; Suping Chang; Tiebang Xie; Xuanze Wang

doi:10.1117/12.783293

27 November 2007 Applied research on four-quadrant optoelectronic detector for surface topography measurement

Shuzhen Wang, Suping Chang, Tiebang Xie, Xuanze Wang

Author Affiliations +

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672329 (2007) https://doi.org/10.1117/12.783293
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A spatial arrangement of four-quadrant optoelectronic detector is presented to detect interference fringes in 3D surface topography measurement. By putting the '⊞-shaped symmetry four-quadrant optoelectronic detector into the interference fringes region inclined at a certain angle, the difference signal with a higher SNR can be obtained even the shape or width of fringes may vary in a certain range. The relationship between interference fringe width d, photodiode arrays rotary angle β, and amplitude, phase difference of the difference signal is analyzed by integral analysis in ideal conditions. Appropriate value of fringe width d and associated rotary angle β that meets orthogonality relation are given. The results of the experiment and analysis indicate that the two difference signals satisfy the requirement of counter and subdivision and thus can reach the accuracy of nanometric scale measurement by the spatial arrangement of the photodiodes.

Citation Download Citation

Shuzhen Wang, Suping Chang, Tiebang Xie, and Xuanze Wang "Applied research on four-quadrant optoelectronic detector for surface topography measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672329 (27 November 2007); https://doi.org/10.1117/12.783293

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