PROCEEDINGS VOLUME 6792
24TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE | 21-24 JANUARY 2008
24th European Mask and Lithography Conference
Editor Affiliations +
IN THIS VOLUME

14 Sessions, 43 Papers, 0 Presentations, 0 Posters
Simulation  (2)
Resist  (1)
Metrology  (6)
RET  (3)
EUV I  (2)
NIL  (2)
EUL II  (2)
24TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
21-24 January 2008
Dresden, Germany
Front Matter: Volume 6792
Proceedings Volume 24th European Mask and Lithography Conference, 679201 (2008) https://doi.org/10.1117/12.801396
Plenary Session I
Proceedings Volume 24th European Mask and Lithography Conference, 679202 (2008) https://doi.org/10.1117/12.798511
Double Patterning
S. Geisler, J. Bauer, U. Haak, D. Stolarek, K. Schulz, H. Wolf, W. Meier, M. Trojahn, E. Matthus, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 679203 (2008) https://doi.org/10.1117/12.798512
Robert de Kruif, Karsten Bubke, Gert-Jan Janssen, Eddy van der Heijden, Jörg Fochler, Mircea Dusa, Jan Hendrik Peters, Paul de Haas, Brid Connolly
Proceedings Volume 24th European Mask and Lithography Conference, 679204 (2008) https://doi.org/10.1117/12.798515
Proceedings Volume 24th European Mask and Lithography Conference, 679205 (2008) https://doi.org/10.1117/12.798518
Simulation
Proceedings Volume 24th European Mask and Lithography Conference, 679206 (2008) https://doi.org/10.1117/12.798519
Proceedings Volume 24th European Mask and Lithography Conference, 679207 (2008) https://doi.org/10.1117/12.798520
Mask Business and Mask Data Prep
Hitoshi Sunaoshi, Takashi Kamikubo, Rieko Nishimura, Kaoru Tsuruta, Takehiko Katsumata, Takayuki Ohnishi, Hirohito Anze, Jun Takamatsu, Shusuke Yoshitake, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 679208 (2008) https://doi.org/10.1117/12.798521
Proceedings Volume 24th European Mask and Lithography Conference, 679209 (2008) https://doi.org/10.1117/12.798583
Proceedings Volume 24th European Mask and Lithography Conference, 67920A (2008) https://doi.org/10.1117/12.798584
Frank Thrum, Johannes Kretz, Christoph Hohle, Kang-Hoon Choi, Katja Keil
Proceedings Volume 24th European Mask and Lithography Conference, 67920B (2008) https://doi.org/10.1117/12.798585
Mask Cleaning / Haze
Jean Marie Foray, Patrice Dejaune, Pierre Sergent, Stuart Gough, D. Cheung, Magali Davenet, Arnaud Favre, C. Rude, T. Trautmann, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 67920C (2008) https://doi.org/10.1117/12.798586
Michael Graham, Andrew McDonald
Proceedings Volume 24th European Mask and Lithography Conference, 67920D (2008) https://doi.org/10.1117/12.798592
Banqiu Wu, Ajay Kumar
Proceedings Volume 24th European Mask and Lithography Conference, 67920E (2008) https://doi.org/10.1117/12.798593
Inspection and Repair
J. H. Peters, C. Tonk, D. Spriegel, Hak-Seung Han M.D., Wonil Cho, Stefan Wurm
Proceedings Volume 24th European Mask and Lithography Conference, 67920F (2008) https://doi.org/10.1117/12.798594
Thomas Schulmeyer, Heiko Schmalfuss, Jan Heumann, Michael Lang
Proceedings Volume 24th European Mask and Lithography Conference, 67920G (2008) https://doi.org/10.1117/12.798595
Proceedings Volume 24th European Mask and Lithography Conference, 67920H (2008) https://doi.org/10.1117/12.798599
Proceedings Volume 24th European Mask and Lithography Conference, 67920I (2008) https://doi.org/10.1117/12.798601
Resist
Anna Klukowska, Marko Vogler, Anett Kolander, Freimut Reuther, Gabi Gruetzner, Michael Muehlberger, Iris Bergmair, Rainer Schoeftner
Proceedings Volume 24th European Mask and Lithography Conference, 67920J (2008) https://doi.org/10.1117/12.798602
Metrology
Eelco van Setten, Onno Wismans, Kees Grim, Jo Finders, Mircea Dusa, Robert Birkner, Rigo Richter, Thomas Scherübl
Proceedings Volume 24th European Mask and Lithography Conference, 67920K (2008) https://doi.org/10.1117/12.798603
Pavel Nesladek, Andreas Wiswesser, Björn Sass, Sebastian Mauermann
Proceedings Volume 24th European Mask and Lithography Conference, 67920L (2008) https://doi.org/10.1117/12.798777
G. Klose, U. Buttgereit, M. Arnz, N. Rosenkranz
Proceedings Volume 24th European Mask and Lithography Conference, 67920M (2008) https://doi.org/10.1117/12.798779
Takaharu Nagai, Kei Mesuda, Takanori Sutou, Yuichi Inazuki, Hiroyuki Hashimoto, Toshifumi Yokoyama, Nobuhito Toyama, Yasutaka Morikawa, Hiroshi Mohri, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 67920N (2008) https://doi.org/10.1117/12.798781
W. Häßler-Grohne, C. G. Frase, D. Gnieser, H. Bosse, J. Richter, A. Wiswesser
Proceedings Volume 24th European Mask and Lithography Conference, 67920O (2008) https://doi.org/10.1117/12.798783
M. Wurm, A. Diener, B. Bodermann
Proceedings Volume 24th European Mask and Lithography Conference, 67920P (2008) https://doi.org/10.1117/12.798784
RET
Christoph Noelscher, Franck Jauzion-Graverolle, Thomas Henkel
Proceedings Volume 24th European Mask and Lithography Conference, 67920Q (2008) https://doi.org/10.1117/12.798807
Proceedings Volume 24th European Mask and Lithography Conference, 67920R (2008) https://doi.org/10.1117/12.798809
M. Chandrachood, T. Y. B. Leung, K. Yu, M. Grimbergen, S. Panayil, I. Ibrahim, A. Sabharwal, A. Kumar
Proceedings Volume 24th European Mask and Lithography Conference, 67920S (2008) https://doi.org/10.1117/12.798810
EUV I
Proceedings Volume 24th European Mask and Lithography Conference, 67920T (2008) https://doi.org/10.1117/12.798933
Proceedings Volume 24th European Mask and Lithography Conference, 67920U (2008) https://doi.org/10.1117/12.798934
NIL
M. Wissen, N. Bogdanski, S. Moellenbeck, H.-C. Scheer
Proceedings Volume 24th European Mask and Lithography Conference, 67920V (2008) https://doi.org/10.1117/12.798935
Gerard M. Schmid, Niyaz Khusnatdinov, Cynthia B. Brooks, Dwayne LaBrake, Ecron Thompson, Douglas J. Resnick, Jordan Owens, Arnie Ford, Shiho Sasaki, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 67920W (2008) https://doi.org/10.1117/12.798936
EUL II
Proceedings Volume 24th European Mask and Lithography Conference, 67920X (2008) https://doi.org/10.1117/12.798937
Frank Laske, Hiroshi Kinoshita, Naoki Nishida, Daisuke Kenmochi, Hitoshi Ota, Yukitake Tanioka, Slawomir Czerkas, Karl-Heinrich Schmidt, Dieter Adam, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 67920Y (2008) https://doi.org/10.1117/12.798939
Poster Session
Proceedings Volume 24th European Mask and Lithography Conference, 67920Z (2008) https://doi.org/10.1117/12.798785
S. Geisler, J. Bauer, U. Haak, U. Jagdhold, R. Pliquett, E. Matthus, R. Schrader, H. Wolf, U. Baetz, et al.
Proceedings Volume 24th European Mask and Lithography Conference, 679210 (2008) https://doi.org/10.1117/12.798786
U. Weidenmueller, H. Alves, B. Schnabel, B. Icard, L. Pain, J.-C. Le Denmat, S. Manakli, J. Pradelles
Proceedings Volume 24th European Mask and Lithography Conference, 679211 (2008) https://doi.org/10.1117/12.798788
John C. Lam, Alexander Gray, Stanley Chen, Jan Richter
Proceedings Volume 24th European Mask and Lithography Conference, 679212 (2008) https://doi.org/10.1117/12.798790
Proceedings Volume 24th European Mask and Lithography Conference, 679213 (2008) https://doi.org/10.1117/12.798801
Anja Voigt, Josef Kouba, Marina Heinrich, Gabi Gruetzner, Heinz-Ulrich Scheunemann, I. Rudolph, Christoph Waberski
Proceedings Volume 24th European Mask and Lithography Conference, 679214 (2008) https://doi.org/10.1117/12.798802
Frank Hillmann, Gerd Scheuring, Hans-Jürgen Brück
Proceedings Volume 24th European Mask and Lithography Conference, 679215 (2008) https://doi.org/10.1117/12.798803
N. Tsikrikas, G. P. Patsis, I. Raptis, A. Gerardino
Proceedings Volume 24th European Mask and Lithography Conference, 679216 (2008) https://doi.org/10.1117/12.798804
Ute Buttgereit, Sascha Perlitz, Dirk Seidel
Proceedings Volume 24th European Mask and Lithography Conference, 679217 (2008) https://doi.org/10.1117/12.798805
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