Microtransfer molding of SU-8 micro-optics

A. Cannistra; P. Srinivasan; E. G. Johnson; T. J. Suleski

doi:10.1117/12.769694

6 February 2008 Microtransfer molding of SU-8 micro-optics

A. Cannistra, P. Srinivasan, E. G. Johnson, T. J. Suleski

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Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 68830C (2008) https://doi.org/10.1117/12.769694
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

SU-8 is a very promising polymer for micro-optics. It is mechanically robust with high thermal and chemical resistance, has high transmission at visible and near-infrared wavelengths, and has relatively high refractive index after curing. While lithographic patterning of SU-8 is relatively common, molding of SU-8 is more difficult due to challenges with solvent removal and cross linking. In this paper, we discuss techniques for micromolding of micro- and nano-optics in SU-8. Elastomeric mold templates are first cast from master structures fabricated using standard techniques. The elastomeric templates are then used in low pressure molding processes to produce high-fidelity refractive and diffractive micro-optics in SU-8. The use of the elastomeric replica mold enables realization of a wider variety of optical surfaces than can be achieved with conventional lithographic patterning in SU-8, and further enables conformal fabrication of SU-8 micro-optics on non-planar surfaces. Molding processes and experimental results for both thin (diffractive) and thick (refractive) elements are presented. Replication of SU-8 micro-optics on both planar and non-planar surfaces, and hybrid processes combining molding and lithographic exposure are demonstrated.

Citation Download Citation

A. Cannistra, P. Srinivasan, E. G. Johnson, and T. J. Suleski "Microtransfer molding of SU-8 micro-optics", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 68830C (6 February 2008); https://doi.org/10.1117/12.769694

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