Scanner deflection of top-hat converted single-mode lasers for cost-effective micro-machining at highest quality

B. Guetlich; T. Mitra; F. Toennissen; O. Homburg; L. Aschke

doi:10.1117/12.808163

19 February 2009 Scanner deflection of top-hat converted single-mode lasers for cost-effective micro-machining at highest quality

B. Guetlich, T. Mitra, F. Toennissen, O. Homburg, L. Aschke

Author Affiliations +

Proceedings Volume 7194, Laser Resonators and Beam Control XI; 71940A (2009) https://doi.org/10.1117/12.808163
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Direct laser patterning of various materials is today widely used in several micro-system production lines like inkjet printing, solar cell technology, flat-panel display production and medicine. Typically single-mode solid state lasers and their higher harmonics are used especially for machining of holes and grooves. The most prominent lasers are pulsed Nd:YAG lasers and their harmonics @ 266, 355 and 532 nm. Recently, the striking advantages of flat top intensity distributions for the efficiency and quality of these processes were demonstrated. The use of LIMO's compact Gaussian-to- top-hat converter enables the creation of steeper and sharper edges. Additionally, the higher energy efficiency of rectangular top hat profiles compared to smooth, circular Gaussian shapes allows for faster patterning. A standard method to reduce process times is the use of optical scanning systems. Yet, the application of Gaussian-to-top-hat converters in combination with a scanner was hindered by distortions of the top hat introduced by the F-Theta focussing lens of the scanners even at very small deflection angles (<2°). We solved this challenge by implementing an alternative scanning approach (patent pending). Scanning results obtained with a 50x50μm² top hat field (homogeneity down to <10%) in a scan area of 156x156mm² will be presented. The minimal distortions of the top hat observed within the scan area make LIMO's compact Gaussian-to-top-hat converter excellently suited for industrial scanning applications, e.g. for the processing of solar panels.

Citation Download Citation

B. Guetlich, T. Mitra, F. Toennissen, O. Homburg, and L. Aschke "Scanner deflection of top-hat converted single-mode lasers for cost-effective micro-machining at highest quality", Proc. SPIE 7194, Laser Resonators and Beam Control XI, 71940A (19 February 2009); https://doi.org/10.1117/12.808163

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