Sensitivity evaluation of a Love wave sensor with multilayer structure for biochemical application

Haekwan Oh; Wen Wang; Keekeun Lee; Sangsik Yang

doi:10.1117/12.809982

23 February 2009 Sensitivity evaluation of a Love wave sensor with multilayer structure for biochemical application

Haekwan Oh, Wen Wang, Keekeun Lee, Sangsik Yang

Proceedings Volume 7207, Microfluidics, BioMEMS, and Medical Microsystems VII; 72070R (2009) https://doi.org/10.1117/12.809982
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

This paper presents a sensitivity evaluation of a love wave sensor with multilayer structure consisting of polymethyl methacrylate (PMMA)/SiO₂/41^o YX LiNbO₃. A theoretical model is presented to describe wave propagation in love wave devices with multilayered structure on large piezoelectric substrate. A complex dispersion equation expanded into Taylor series was presented to describe the lossy mechanism of the PMMA layer. Using the gold film as the sensitive interface, the mass loading sensitivity of the love wave sensor for biochemical application was evaluated theoretically, and the effects from the SiO₂ and PMMA on the sensor sensitivity were investigated to allow the design of an optimized structure. From the calculated results, the optimal thicknesses of SiO₂ and PMMA in the multilayered structure were determined, and the sensitivity comparison between love waves in LiNbO₃/SiO₂/PMMA and LiNbO₃/PMMA was studied, which shows that there is larger mass loading sensitivity in love wave devices with multilayered structure.

Citation Download Citation

Haekwan Oh, Wen Wang, Keekeun Lee, and Sangsik Yang "Sensitivity evaluation of a Love wave sensor with multilayer structure for biochemical application", Proc. SPIE 7207, Microfluidics, BioMEMS, and Medical Microsystems VII, 72070R (23 February 2009); https://doi.org/10.1117/12.809982

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available