Advanced optical coatings of a segmented MEMS DM

Michael A. Helmbrecht; Min He

doi:10.1117/12.813821

23 February 2009 Advanced optical coatings of a segmented MEMS DM

Michael A. Helmbrecht, Min He

Proceedings Volume 7209, MEMS Adaptive Optics III; 72090M (2009) https://doi.org/10.1117/12.813821
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

The performance of microelectromechanical systems deformable mirrors (MEMS DMs) continues to improve in areas of stroke, open-loop positioning, actuator count, and drive electronics. However, a key area lacking in the development of these devices is good optical coatings suitable for a broad spectrum of applications and wavelengths. This paper discusses the progress Iris AO has made towards coating its MEMS DMs with gold, protected aluminum, protected silver, and dielectric coatings.

Citation Download Citation

Michael A. Helmbrecht and Min He "Advanced optical coatings of a segmented MEMS DM", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090M (23 February 2009); https://doi.org/10.1117/12.813821

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