Epitaxial growth a-plane ZnO films on a-GaN/r-Al2O3 templates

Cheng Liu; Jiangnan Dai; Zhihao Wu; Xiangyun Han; Qinghua He; Chenhui Yu; Lei Zhang; Yihua Gao; Changqing Chen

doi:10.1117/12.823281

19 February 2009 Epitaxial growth a-plane ZnO films on a-GaN/r-Al₂O₃ templates

Cheng Liu, Jiangnan Dai, Zhihao Wu, Xiangyun Han, Qinghua He, Chenhui Yu, Lei Zhang, Yihua Gao, Changqing Chen

Proceedings Volume 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration; 72791L (2009) https://doi.org/10.1117/12.823281
Event: Photonics and Optoelectronics Meetings, 2008, Wuhan, China

Abstract

In this work, we have grown a-plane ZnO films on a-plane GaN/r-sapphire templates by pulsed laser deposition. The aplane GaN of the templates is aimed to mitigate the large lattice mismatch between ZnO and sapphire, and was grown by metal organic chemical vapor deposition. The grown a-plane ZnO films have been analyzed by various techniques such as high resolution X-ray diffraction, photoluminescence. It shows that high quality a-plane ZnO films have been achieved by our growth method.

Citation Download Citation

Cheng Liu, Jiangnan Dai, Zhihao Wu, Xiangyun Han, Qinghua He, Chenhui Yu, Lei Zhang, Yihua Gao, and Changqing Chen "Epitaxial growth a-plane ZnO films on a-GaN/r-Al₂O₃ templates", Proc. SPIE 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration, 72791L (19 February 2009); https://doi.org/10.1117/12.823281

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