Micro-structuring of photonic materials by deep-ultraviolet laser

Yutang Dai; Desheng Jiang; Gang Xu

doi:10.1117/12.832084

18 May 2009 Micro-structuring of photonic materials by deep-ultraviolet laser

Yutang Dai, Desheng Jiang, Gang Xu

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840P (2009) https://doi.org/10.1117/12.832084
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

157nm deep-ultraviolet laser is considered as one of good 3D micro-structuring tools. In this study, a micro-fabrication system based on the 157 nm laser is conducted to micro-structuring experiments of photonic materials. For laser ablation of fused silica, the ablation rate is about 80nm/pulse under laser fluence of 5 J/cm2. A micro-hole array is produced in silica glass chip, and several 3D microstructures are ablated into SMF-28 optical fibers. Experiments and analysis show that, material removal is dominantly photon-chemical process in case of 157nm laser machining.

Citation Download Citation

Yutang Dai, Desheng Jiang, and Gang Xu "Micro-structuring of photonic materials by deep-ultraviolet laser", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840P (18 May 2009); https://doi.org/10.1117/12.832084

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