PROCEEDINGS VOLUME 7591
SPIE MOEMS-MEMS | 23-28 JANUARY 2010
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
Editor Affiliations +
Proceedings Volume 7591 is from: Logo
SPIE MOEMS-MEMS
23-28 January 2010
San Francisco, California, United States
Front Matter: Volume 7591
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759101 (2010) https://doi.org/10.1117/12.861996
Non-Diffraction Limited 3D Laser Lithography
Robert R. McLeod, Benjamin A. Kowalski, Michael C. Cole
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759102 (2010) https://doi.org/10.1117/12.845850
C. Schizas, V. Melissinaki, A. Gaidukeviciute, C. Reinhardt, C. Ohrt, V. Dedoussis, B. N. Chichkov, C. Fotakis, D. Karalekas, et al.
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759105 (2010) https://doi.org/10.1117/12.840695
Nanofabrication I: Photonic Nanostructures
Hongkwon Kim, Arthur Zhang, Yu-Hwa Lo
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759106 (2010) https://doi.org/10.1117/12.842276
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759107 (2010) https://doi.org/10.1117/12.840546
Judson D. Ryckman, Marco Liscidini, J. E. Sipe, S. M. Weiss
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759108 (2010) https://doi.org/10.1117/12.842898
Evan J. Lunt, Brian S. Phillips, Jared M. Keeley, Aaron R. Hawkins, Philip Measor, Bin Wu, Holger Schmidt
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759109 (2010) https://doi.org/10.1117/12.841010
Nicholas A. Vacirca, Timothy P. Kurzweg
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910A (2010) https://doi.org/10.1117/12.841436
Advanced Lithography
Yu-Yen Huang, Yuyan Wang, Kazunori Hoshino, David Giese, Yujan Shrestha, Xiaojing Zhang
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910C (2010) https://doi.org/10.1117/12.842625
Winnie N. Ye, Peter Duane, Munib Wober, Kenneth B. Crozier
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910D (2010) https://doi.org/10.1117/12.840725
New Materials
Carsten Becker-Willinger, Pamela Kalmes, Petra Herbeck-Engel, Michael Veith
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910G (2010) https://doi.org/10.1117/12.841668
Laser-Based Fabrication
Vygantas Mizeikis, Saulius Juodkazis, Kai Sun, Hiroaki Misawa
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910J (2010) https://doi.org/10.1117/12.843074
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910K (2010) https://doi.org/10.1117/12.840657
Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, Qiaofen Zhou
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910M (2010) https://doi.org/10.1117/12.840603
Nanofabrication II: Active and Passive Devices
R. Singh, N. Gupta, J. A. Sadie, K. F. Poole, J. Ballato, S. J. Hwu
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910N (2010) https://doi.org/10.1117/12.845954
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910O (2010) https://doi.org/10.1117/12.843255
A. A. Cruz-Cabrera, S. A. Kemme, M. J. Cich, A. R. Ellis, J. R. Wendt, A. M. Rowen, S. Samora, M. J. Martinez, D. A. Scrymgeour, et al.
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910P (2010) https://doi.org/10.1117/12.842602
O. Setyawati, M. Engenhorst, S. Wittzack, F. Köhler, C. Woidt, T. Woit, V. Daneker, M. Bartels, H. Hillmer
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910R (2010) https://doi.org/10.1117/12.841881
Nanofabrication III: Growth and Deposition
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910S (2010) https://doi.org/10.1117/12.841343
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910T (2010) https://doi.org/10.1117/12.840437
Micro- and Nano-Optics
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910W (2010) https://doi.org/10.1117/12.837165
Martin Hünten, Fritz Klocke, Olaf Dambon
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910X (2010) https://doi.org/10.1117/12.840271
Marcel Demmler, Michael Zeuner, Frank Allenstein, Thoralf Dunger, Matthias Nestler, Sven Kiontke
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910Y (2010) https://doi.org/10.1117/12.840908
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910Z (2010) https://doi.org/10.1117/12.843526
Poster Session
Chia-Chin Chiang, Liren Tsai, Hao-Jhen Chang, Chih-Lang Lin, Jin-Shun Kuo
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759110 (2010) https://doi.org/10.1117/12.841217
Michael Angelo-Anthony Daniele, Alexandra L. Foguth, Parul Rungta, Iurii Bandera, Volodymyr Tsyalkovskyy, Stephen H. Foulger
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759111 (2010) https://doi.org/10.1117/12.842647
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759112 (2010) https://doi.org/10.1117/12.842913
J. Kim, B. C. Lee, C. Kang, S. Y. Lee, J. H. Park, H. J. Shin
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759113 (2010) https://doi.org/10.1117/12.842916
Sönke Steenhusen, Thomas Stichel, Ruth Houbertz, Gerhard Sextl
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759114 (2010) https://doi.org/10.1117/12.852324
Mohammad A. U. Usman, Brady Smith
Proceedings Volume Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 759115 (2010) https://doi.org/10.1117/12.855615
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