Fabrication of multiwalled carbon nanotube polydimethylsiloxne nanocomposite polymer flexible microelectrodes for microfluidics and MEMS

A. Khosla; B. L. Gray

doi:10.1117/12.847292

9 April 2010 Fabrication of multiwalled carbon nanotube polydimethylsiloxne nanocomposite polymer flexible microelectrodes for microfluidics and MEMS

A. Khosla, B. L. Gray

Author Affiliations +

Proceedings Volume 7642, Electroactive Polymer Actuators and Devices (EAPAD) 2010; 76421V (2010) https://doi.org/10.1117/12.847292
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

We present the preparation, characterization and electrical properties of a flexible electrically conducting nanocomposite polymer which has been prepared by high frequency ultrasonic agitation (42 kHz) of COOH functionalized multiwalled carbon nanotubes (MWCNTs) (outer diameter of 10nm and length of 30μm) in polydimethylsiloxane (PDMS) polymer matrix. We have characterized and compared the resistivity of films 3cm x 1 cm x 0.01cm in size as a function of weight percentage (ranging from 0.5 to 4.5) of COOH- functionalized MWCNT in the PDMS matrix, with a rest that percolation threshold of the prepared nanocomposite is achieved at 1.5 weight percentage (wt-%). The resistivity level achieved at 2 wt-% was approximately 62 Ω-cm. Microelectrodes were fabricated with a height of 30μm, width of 100μm, and lengths (l) ranging from 1mm to 10mm. We also demonstrate an improved micropatterning process than has not been previously reported: hybrid systems composed of micromolded combinations of both conductive nanocomposites with non-conductive PDMS. The fabricated microelectrodes maintain electrical continuity on being bent, flexed or twisted and can be used for electronic routing on a flexible MEMS.

Citation Download Citation

A. Khosla and B. L. Gray "Fabrication of multiwalled carbon nanotube polydimethylsiloxne nanocomposite polymer flexible microelectrodes for microfluidics and MEMS", Proc. SPIE 7642, Electroactive Polymer Actuators and Devices (EAPAD) 2010, 76421V (9 April 2010); https://doi.org/10.1117/12.847292

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