Theoretical and experimental study on the active support

Yongqian Wu; Fan Wu; Gaofeng Wu

doi:10.1117/12.868208

6 October 2010 Theoretical and experimental study on the active support

Yongqian Wu, Fan Wu, Gaofeng Wu

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76553J (2010) https://doi.org/10.1117/12.868208
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Φ300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.

Citation Download Citation

Yongqian Wu, Fan Wu, and Gaofeng Wu "Theoretical and experimental study on the active support", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76553J (6 October 2010); https://doi.org/10.1117/12.868208

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