New data reduction method with local interpolation and global fitting for complementary annular subaperture interferometry

Xi Hou; Fan Wu; Li Yang

doi:10.1117/12.864287

11 October 2010 New data reduction method with local interpolation and global fitting for complementary annular subaperture interferometry

Xi Hou, Fan Wu, Li Yang

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76562L (2010) https://doi.org/10.1117/12.864287
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The objective of this paper is to describe a new data reduction method for measurement of aspheric surface shape with complementary annular subaperture interferometric method. The approach begins with applying least-square method to estimate the misalignments of each subaperture measurement in the local coordinates and then subtracts the nominal aspheric prescription with the analytical formula. Each subaperture data removed misalignments and nominal surface is represented with the corresponding function defined at discrete points. According to the complementary of the adjacent subapertures, each normalized subaperture data is properly scaled and shifted into the global coordinates. The combination data is further analyzed by the local interpolation and the global Zernike fitting. The experiment results show that the performance on the reconstruction accuracy, computational efficiency and characterizing the higher spatialfrequency information of the new reduction method is better than that of the previously reported reconstruction algorithm with Zernike annular polynomials and matrix method.

Citation Download Citation

Xi Hou, Fan Wu, and Li Yang "New data reduction method with local interpolation and global fitting for complementary annular subaperture interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562L (11 October 2010); https://doi.org/10.1117/12.864287

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