Non-contact high precision measurement of surface form tolerances and central thickness for optical elements

Ying Lou

doi:10.1117/12.866166

12 October 2010 Non-contact high precision measurement of surface form tolerances and central thickness for optical elements

Ying Lou

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765656 (2010) https://doi.org/10.1117/12.866166
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The traditional contact measuring methods could not satisfy the current optical elements measuring requirements. Noncontact high precision measuring theory, principle and instrument of the surface form tolerances and central thickness for optical elements were studied in the paper. In comparison with other types of interferometers, such as Twyman-Green and Mach-Zehnder, a Fizeau interferometer has the advantages of having fewer optical components, greater accuracy, and is easier to use. Some relations among the 3/A(B/C), POWER/PV and N/ΔN were studied. The PV with POWER removed can be the reference number of ΔN. The chromatic longitudinal aberration of a special optical probe can be used for non-contanct central thickness measurement.

Citation Download Citation

Ying Lou "Non-contact high precision measurement of surface form tolerances and central thickness for optical elements", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765656 (12 October 2010); https://doi.org/10.1117/12.866166

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