Paper
27 August 2010 Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization
Author Affiliations +
Abstract
Microassembly has been identified as one of critical techniques in innovating the promising era of micro/nano technology. Several works have been investigated to fabricate various micro-devices such as micro-sensors and microactuators. Assembly plays an important role for fabricating micro-devices. However, there are only few studies in the assembly of microparts. In this paper, we present manipulation and assembly of three-dimensional microparts produced by two-photon polymerization where optical trapping technique was used to manipulate microparts. We show exemplary microassembly formed by assembling two microparts, a movable female part and a male part fixed on a glass substrate.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jung-Dae Kim, Sun-Uk Hwang, Hyun-Geun Shin, and Yong-Gu Lee "Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization", Proc. SPIE 7762, Optical Trapping and Optical Micromanipulation VII, 776231 (27 August 2010); https://doi.org/10.1117/12.860240
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Cited by 2 scholarly publications.
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KEYWORDS
Optical tweezers

Objectives

Two photon polymerization

Spatial light modulators

Beam splitters

Mirrors

Holography

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