Paper
28 February 2011 Woodpile photonic crystal of various crystal orientations
Lingling Tang, Shu-Yu Su, Tomoyuki Yoshie
Author Affiliations +
Abstract
Three-dimensional woodpile photonic crystals with a variety of crystal orientations and surfaces, including (110), (001), (100) and (010) planes, are fabricated in GaAs and silicon with the multi-directional etching method. The optical properties of the fabricated woodpile photonic crystals are characterized via reflectance spectra measurement. High reflectivity is observed in 1200 nm to 1550 nm wavelength, exhibiting a photonic bandgap. The ultra-high-Q microcavities designed by unit cells size modulation consist of straight dielectric rods only; therefore, they could be fabricated by the directional etching methods. A high quality factor is expected in the microcavity fabricated by the one-top, one-side etching approach.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lingling Tang, Shu-Yu Su, and Tomoyuki Yoshie "Woodpile photonic crystal of various crystal orientations", Proc. SPIE 7946, Photonic and Phononic Properties of Engineered Nanostructures, 79460M (28 February 2011); https://doi.org/10.1117/12.874287
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Cited by 2 scholarly publications.
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KEYWORDS
Etching

Photonic crystals

Semiconducting wafers

Optical microcavities

Reflectivity

Silicon

Chromium

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