Paper
26 July 2011 Diffractive masks by confocal microscopy
P. Maceira, V. Moreno, J. R. Salgueiro, F. Guitian, A. Gil
Author Affiliations +
Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 80013L (2011) https://doi.org/10.1117/12.892177
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal
Abstract
We show how confocal microscopy can be used as a simple, fast and flexible technique to fabricate multiple diffractive masks on a single plate. These masks are useful to make full bandgap photonic crystals with a woodpile structure in a single illumination step. The versatility for the control of the confocal microscope allows to define the illumination area and codify the features of the diffractive mask in a simple and straightforward way. The period of the diffraction grating can be easily established by modifying the illumination area. This allows to control the dimensions of the woodpile structures and consequently the bandgap spectral range of the fabricated structures.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Maceira, V. Moreno, J. R. Salgueiro, F. Guitian, and A. Gil "Diffractive masks by confocal microscopy", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 80013L (26 July 2011); https://doi.org/10.1117/12.892177
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KEYWORDS
Photomasks

Confocal microscopy

Diffraction gratings

Microscopes

Photoresist materials

Fabrication

Lithography

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