Paper
25 October 2011 Rules for optical metrology
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Abstract
Based on 30 years of optical testing experience, I have defined seven guiding principles for optical testing. This paper introduces these rules and discusses examples of their application.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Philip Stahl "Rules for optical metrology", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80111B (25 October 2011); https://doi.org/10.1117/12.902826
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Mirrors

Optical testing

Metrology

James Webb Space Telescope

Distortion

Interferometers

Optical fabrication

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