Interferometric multiwavelength system for long gauge blocks measurements

Michal Wengierow; Leszek Sałbut; Zbigniew Ramotowski

doi:10.1117/12.889785

27 May 2011 Interferometric multiwavelength system for long gauge blocks measurements

Michal Wengierow, Leszek Sałbut, Zbigniew Ramotowski

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80822R (2011) https://doi.org/10.1117/12.889785
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

This paper describes common efforts of Warsaw University of Technology and Polish Central Office of Measure to build a multiwavelength interferometer with extended measurement range to calibrate long gauge blocks. To achieve this goal modified automatic fringe pattern analysis method based on fringe fraction method is proposed. The setup with special chamber with active temperature control to stabilize environmental conditions has been build. To assure correctness of measure factors like temperature, pressure, humidity and concentration of CO2 are need to be constantly monitored by network of sensors. Summarizing all this efforts we are presenting gauge blocks calibration results with uncertainty analysis.

Citation Download Citation

Michal Wengierow, Leszek Sałbut, and Zbigniew Ramotowski "Interferometric multiwavelength system for long gauge blocks measurements", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822R (27 May 2011); https://doi.org/10.1117/12.889785

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