Fabrication of bilayer wire grid polarizer using replicated polymer nano grating

Yunah Han; Jwasun Kim; Euihyeon Byeon; Seok-Min Kim; Yong-ho Lee; Chang Kwon Hwangbo

doi:10.1117/12.896756

21 September 2011 Fabrication of bilayer wire grid polarizer using replicated polymer nano grating

Yunah Han, Jwasun Kim, Euihyeon Byeon, Seok-Min Kim, Yong-ho Lee, Chang Kwon Hwangbo

Proceedings Volume 8169, Optical Fabrication, Testing, and Metrology IV; 81690H (2011) https://doi.org/10.1117/12.896756
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

A bilayer wire grid polarizer composed of UV-replicated nanograting and deposited aluminum layer was designed, fabricated and evaluated for a simpler and less costly reflective polarizer. An electroformed nickel stamp was fabricated using a lithographed photo resist master pattern having a nanograting with a pitch of 80 nm, a line width of 50 nm, and a height of grating of 100 nm. A polymer grating was fabricated by the UV replication process and an aluminum layer with a thickness of 50 nm was deposited by electron-beam evaporation. To examine the performance of the fabricated bilayer wire-grid polarizer, the transmission spectra of TM- and TE-polarized light, and the extinction ratio spectra were measured and compared with the simulated values obtained from the rigorous coupled wave analysis. The measured TMtransmittance and extinction ratio of the fabricated bilayer wire grid polarizer were ~ 40 % and ~ 103 in whole visible ranges, respectively.

Citation Download Citation

Yunah Han, Jwasun Kim, Euihyeon Byeon, Seok-Min Kim, Yong-ho Lee, and Chang Kwon Hwangbo "Fabrication of bilayer wire grid polarizer using replicated polymer nano grating", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690H (21 September 2011); https://doi.org/10.1117/12.896756

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