Design of modern nanofabrication facilities

Sarah Beswick; Andrew Smith; Dru Morrish; Daniel J. Day; Saulius Juodkazis; Min Gu

doi:10.1117/12.904711

23 December 2011 Design of modern nanofabrication facilities

Sarah Beswick, Andrew Smith, Dru Morrish, Daniel J. Day, Saulius Juodkazis, Min Gu

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82043K (2011) https://doi.org/10.1117/12.904711
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

We present a set of practical rules critical for designing and building a modern nanotechnology laboratory, focused on photonic applications in a cleanroom environment. We show the impacts on time, cost and quality of early design decisions and its importance on achieving the final fully functional laboratory. Best practice examples are presented for setting up a modern laboratory/facility, following analysis of the time, cost and quality constraints. The case study presented is the engineering and architectural solution of the nanofabrication cleanroom facility in the Advanced Technology Centre at Swinburne University of Technology, Australia. Set of practical rules is established for the cost and time efficient set up of the nanotechnology facilities for the research and development.

Citation Download Citation

Sarah Beswick, Andrew Smith, Dru Morrish, Daniel J. Day, Saulius Juodkazis, and Min Gu "Design of modern nanofabrication facilities", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043K (23 December 2011); https://doi.org/10.1117/12.904711

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Nanofabrication

Nanotechnology

Electron beam lithography

Nanoplasmonics

Research facilities

Gases

Magnetic resonance imaging

Show All Keywords

Keywords/Phrases

Search In:

Publication Years