Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication conditions

Y. Peng; Y. M. Zhu

doi:10.1117/12.915537

23 February 2012 Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication conditions

Y. Peng, Y. M. Zhu

Author Affiliations +

Proceedings Volume 8271, Quantum Dots and Nanostructures: Synthesis, Characterization, and Modeling IX; 82710I (2012) https://doi.org/10.1117/12.915537
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We fabricated micro-spikes on the surface of silicon by using femtosecond laser pulses. By changing the fabrication condition, i.e., the power of laser, the number of laser pulses, the wavelength of laser, and the proportional relation between laser power and pulse number under the same laser fluence, we found many interesting phenomena, which proved there was a special relation between laser parameters and the surface morphology. All these results are important for the optimal fabrication of surface-microstructured photovoltaic material with high absorptance and good photoelectric properties, for the practical applications of solar cell, et al.

Citation Download Citation

Y. Peng and Y. M. Zhu "Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication conditions", Proc. SPIE 8271, Quantum Dots and Nanostructures: Synthesis, Characterization, and Modeling IX, 82710I (23 February 2012); https://doi.org/10.1117/12.915537

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