An interference signal processing method for displacement measurement by dual wavelength and single grating

Guochao Wang; Shuhua Yan; Dongxing Yang; Weihong Zhou; Xuedong Xie

doi:10.1117/12.904076

15 November 2011 An interference signal processing method for displacement measurement by dual wavelength and single grating

Guochao Wang, Shuhua Yan, Dongxing Yang, Weihong Zhou, Xuedong Xie

Author Affiliations +

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83211A (2011) https://doi.org/10.1117/12.904076
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

Displacement measurement by dual wavelength and single grating integrates the single grating diffraction theory and the heterodyne interference theory. By taking advantage of the two theories, it solves the contradiction between large range and high precision in grating displacement measurement quite well. In order to obtain nanometer resolution and nanometer precision, high-power subdivision of interference fringe must be realized accurately. According to phase demodulation theory for heterodyne interference signal, a digital phase measuring method is proposed by combining frequency-mixing technique and pulse-filling method. The whole signal processing part, which is based on FPGA and PLL, has been designed to realize the integer period measurement and high-powered subdivision of the decimal phase. Through experiments, it is validated that the phase range is [-180°, 180°], and the phase measurement resolution and the phase precision are above 0.03° and 0.1°, respectively. Moreover, the displacement measurement resolution and the displacement precision, corresponding to the phase indexes, are 0.167nm and 0.556nm, respectively.

Citation Download Citation

Guochao Wang, Shuhua Yan, Dongxing Yang, Weihong Zhou, and Xuedong Xie "An interference signal processing method for displacement measurement by dual wavelength and single grating", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211A (15 November 2011); https://doi.org/10.1117/12.904076

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available