Novel method for fabricating steep aspheric mirrors

Yong Shu; Shengyi Li; Xiaobo Zuo; Ci Song; Yin Wang

doi:10.1117/12.978164

16 October 2012 Novel method for fabricating steep aspheric mirrors

Yong Shu, Shengyi Li, Xiaobo Zuo, Ci Song, Yin Wang

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84160B (2012) https://doi.org/10.1117/12.978164
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Modern optical systems require high quality and compaction at the same time. Steep aspheric mirrors are more and more widely used due to its excellent optical property and high compact structure, but they also put new challenge to optical polishing machine and polishing technology. A novel offset tool axis method is presented to improve the old machine’s polishing ability of steep aspheric mirrors and make good use of the old machine. The simulation shows the offset tool axis method can alleviate non-uniformity distribution of pressure between polishing tool and workpiece, while it also shows the method can enhance the stability and controllability of the polishing process. The pseudo ρ-θ scanning method which combines merits of raster scanning and spiral scanning is presented for offset tool axis method. A 475mm diameter RB-SiC mirror with a relative aperture of 1:1 is polished and surface error reduces to 0.175λ (PV)/0.009λ (RMS) from 0.527λ (PV)/0.079λ (RMS). The result proves the feasibility of the offset tool axis method and pseudo ρ-θ scanning method.

Citation Download Citation

Yong Shu, Shengyi Li, Xiaobo Zuo, Ci Song, and Yin Wang "Novel method for fabricating steep aspheric mirrors", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160B (16 October 2012); https://doi.org/10.1117/12.978164

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