Bonnet polishing high-slope aspheric surface

Jian Zhang

doi:10.1117/12.978165

16 October 2012 Bonnet polishing high-slope aspheric surface

Jian Zhang

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841612 (2012) https://doi.org/10.1117/12.978165
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

The method of bonnet polishing is successfully used to polish an aspheric surface with an aperture of 200 mm and a maximum departure of 700 μm. Based on the principle of bonnet polishing, we employ one IRP 600 machine to finish the aspheric surface which was previously ground to an asphere by Satisloh. According to the analysis of error map obtained by the help of CGH after each iteration, several technological parameters are well verified and the whole precession process is proved to be under good control when the material to be polished is fused silica. With total 12 iterations of 30 hours including 5 pre-polishing iterations and 7 corrective iterations, the surface form accuracy of 80nm (PVq) and 15nm (RMS) over the full aperture is achieved. The results indicate that bonnet polishing can not only realize good form accuracy, but also eliminate a certain mid-frequency effect left by grinding.

Citation Download Citation

Jian Zhang "Bonnet polishing high-slope aspheric surface", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841612 (16 October 2012); https://doi.org/10.1117/12.978165

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