Analysis of noise tolerance for high precision tilting measurement algorithm of moving mirror in Fourier transform infrared spectrometer

Xiaojie Sun; Jianhua Mao; Zuoxiao Dai; Xiang Xia; Tao Li; Zhirui Wang

doi:10.1117/12.975181

15 October 2012 Analysis of noise tolerance for high precision tilting measurement algorithm of moving mirror in Fourier transform infrared spectrometer

Xiaojie Sun, Jianhua Mao, Zuoxiao Dai, Xiang Xia, Tao Li, Zhirui Wang

Author Affiliations +

Proceedings Volume 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing; 842015 (2012) https://doi.org/10.1117/12.975181
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Dynamic alignment system (DAS) is used to correct the misalignment of moving mirror in Fourier Transform Infrared Spectrometer (FTIRS) of which both fixed mirror and moving mirror are plane reflectors. The detecting precision of dynamic tilting angle of moving mirror offers guarantees to the adjustment performances of DAS. In this paper, the noise tolerance of measuring precision of tilting caused by moving mirror are theoretically analyzed and tested. Experimental results show that tilting measuring accuracy is improved with adjusting methods according to the noise tolerance analysis.

Citation Download Citation

Xiaojie Sun, Jianhua Mao, Zuoxiao Dai, Xiang Xia, Tao Li, and Zhirui Wang "Analysis of noise tolerance for high precision tilting measurement algorithm of moving mirror in Fourier transform infrared spectrometer", Proc. SPIE 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing, 842015 (15 October 2012); https://doi.org/10.1117/12.975181

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