Layout and reticle verification for FPD

Makoto Takagi; Kouji Yamaguchi; Hideki Chida; Tsuneo Munakata; Nobuto Ono

doi:10.1117/12.981996

29 June 2012 Layout and reticle verification for FPD

Makoto Takagi, Kouji Yamaguchi, Hideki Chida, Tsuneo Munakata, Nobuto Ono

Proceedings Volume 8441, Photomask and Next-Generation Lithography Mask Technology XIX; 84410M (2012) https://doi.org/10.1117/12.981996
Event: Photomask and NGL Mask Technology XIX, 2012, Yokohama, Japan

Abstract

Flat panel display (fpd) design needs further improving of design quality and efficiency due to aggressive market needs like fast growing 3d panel, big screen for tv. In this paper, we explain the specialized verification technology for panel layout, reticle of fpd whcich enable to reduce the respin and design tat.

Citation Download Citation

Makoto Takagi, Kouji Yamaguchi, Hideki Chida, Tsuneo Munakata, and Nobuto Ono "Layout and reticle verification for FPD", Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410M (29 June 2012); https://doi.org/10.1117/12.981996

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