Multispectral CMOS sensors with on-chip nanostructures for wavelength monitoring of LED devices

Stephan Junger; Nanko Verwaal; Wladimir Tschekalinskij; Norbert Weber

doi:10.1117/12.2004497

4 March 2013 Multispectral CMOS sensors with on-chip nanostructures for wavelength monitoring of LED devices

Stephan Junger, Nanko Verwaal, Wladimir Tschekalinskij, Norbert Weber

Proceedings Volume 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII; 86411B (2013) https://doi.org/10.1117/12.2004497
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

High-end illumination devices based on LEDs require precise color matching, because the dominant wavelength depends on temperature and changes due to aging. We demonstrate the performance of multispectral sensors fabricated using a complementary metal-oxide semiconductor (CMOS) process for color-sensing feedback. Various plasmonic nanostructures were simulated and implemented to achieve band pass and cut-off filters, placed on top of photodiodes. These devices for multispectral sensing can be fabricated in high volume and measurements indicate that a wavelength change of 3 nm yields a relative signal change of more than 20 % due to the steep-edge characteristics of the filters.

Citation Download Citation

Stephan Junger, Nanko Verwaal, Wladimir Tschekalinskij, and Norbert Weber "Multispectral CMOS sensors with on-chip nanostructures for wavelength monitoring of LED devices", Proc. SPIE 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII, 86411B (4 March 2013); https://doi.org/10.1117/12.2004497

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