PROCEEDINGS VOLUME 8763
SPIE MICROTECHNOLOGIES | 24-26 APRIL 2013
Smart Sensors, Actuators, and MEMS VI
Editor Affiliations +
IN THIS VOLUME

12 Sessions, 99 Papers, 0 Presentations, 0 Posters
Packaging  (4)
Materials  (4)
Fluidic MEMS  (2)
Resonators  (4)
Bio-MEMS  (3)
Proceedings Volume 8763 is from: Logo
SPIE MICROTECHNOLOGIES
24-26 April 2013
Grenoble, France
Front Matter: Volume 8763
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876301 (2013) https://doi.org/10.1117/12.2029711
Plenary Session
Carol A. Featherston, Karen M. Holford, Rhys Pullin, Jonathan Lees, Mark Eaton, Matthew Pearson
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876302 (2013) https://doi.org/10.1117/12.2018401
S. Marco, A. Gutiérrez-Gálvez, A. Lansner, D. Martinez, J. P. Rospars, R. Beccherelli, A. Perera, T. Pearce, P. Vershure, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876303 (2013) https://doi.org/10.1117/12.2018402
Energy Scavengers
R. van Schaijk, R. Elfrink, J. Oudenhoven, V. Pop, Z. Wang, M. Renaud
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876305 (2013) https://doi.org/10.1117/12.2016916
L. Francioso, C. De Pascali, A. Taurino, P. Siciliano, A. De Risi
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876306 (2013) https://doi.org/10.1117/12.2017385
K. Thangaraj, A. Elefsiniotis, S. Aslam, Th. Becker, U. Schmid, J. Lees, C. A. Featherston, R. Pullin
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876307 (2013) https://doi.org/10.1117/12.2017691
Joe Briscoe, Nimra Jalai, Peter Wooliams, Mark Stewart, Markys Cain, Paul M. Weaver, Steve Dunn
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876308 (2013) https://doi.org/10.1117/12.2015234
Packaging
Radovan Novotný, Radek Vlach, Jaroslav Kadlec, Radek Kuchta
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876309 (2013) https://doi.org/10.1117/12.2014229
C. Flötgen, M. Pawlak, E. Pabo, H. J. van de Wiel, G. R. Hayes, V. Dragoi
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630A (2013) https://doi.org/10.1117/12.2017350
Jörg Reitterer, Franz Fidler, Ferdinand Saint Julien-Wallsee, Maximilian Barth, Wolfgang Eberhardt, Ulrich Keßler, Heinz Kück, Ulrich Schmid
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630B (2013) https://doi.org/10.1117/12.2017361
G. Sordo, A. Faes, G. Resta, J. Iannacci
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630C (2013) https://doi.org/10.1117/12.2017856
Materials
Saskia Biehl, Christian Rumposch, Christian Recknagel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630D (2013) https://doi.org/10.1117/12.2017374
Janosch Kneer, Manuel Boxberg, Jürgen Wöllenstein
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630E (2013) https://doi.org/10.1117/12.2017330
Scott C. Moulzolf, David J. Frankel, Mauricio Pereira da Cunha, Robert J. Lad
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630F (2013) https://doi.org/10.1117/12.2017596
Ioanna Giouroudi, Mohammed Alnassar, Juergen Kosel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630G (2013) https://doi.org/10.1117/12.2016769
Optical Devices and Systems
V. Jayaraman, B. Potsaid, J. Jiang, G. D. Cole, M. E. Robertson, C. B. Burgner, D. D. John, I. Grulkowski, W. Choi, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630H (2013) https://doi.org/10.1117/12.2018345
F. Jiménez-Márquez, J. Vázquez, J. Úbeda, J. L. Sánchez-Rojas
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630I (2013) https://doi.org/10.1117/12.2016935
A. Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630J (2013) https://doi.org/10.1117/12.2016852
Fluidic MEMS
I. Dufour, E. Lemaire, B. Caillard, H. Debéda, C. Lucat, S. M. Heinrich, F. Josse, O. Brand
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630K (2013) https://doi.org/10.1117/12.2018327
J. Toledo, T. Manzaneque, J. Hernando-García, J. Vazquez, A. Ababneh, H. Seidel, M. Lapuerta, J. L. Sánchez-Rojas
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630L (2013) https://doi.org/10.1117/12.2016998
Thermal Sensors
T. Beutel, M. Schwerter, M. Leester-Schädel, A. Dietzel, S. Büttgenbach
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630N (2013) https://doi.org/10.1117/12.2016755
B. Schmitt, C. Kiefer, A. Schütze
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630O (2013) https://doi.org/10.1117/12.2017293
Florian Dams, Rupert Schreiner
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630P (2013) https://doi.org/10.1117/12.2017345
Microactuators
S. Büttgenbach, A. T. Al-Halhouli, M. Feldmann, V. Seidemann, A. Waldschik
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630R (2013) https://doi.org/10.1117/12.2018391
X. Xu, H.-D. Ngo, P. Mackowiak, E. Obermeier, D. Miletic, H. Gerdes, H.-H. Gatzen
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630S (2013) https://doi.org/10.1117/12.2017559
H. Steiner, W. Hortschitz, M. Stifter, F. Keplinger, T. Sauter
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630T (2013) https://doi.org/10.1117/12.2016828
Resonators
A. Somà, G. De Pasquale
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630U (2013) https://doi.org/10.1117/12.2016774
Stephan Merzsch , Hutomo Suryo Wasisto, Andrej Stranz , Peter Hinze , Thomas Weimann , Erwin Peiner , Andreas Waag
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630V (2013) https://doi.org/10.1117/12.2016932
Martin Kucera, Franz Hofbauer, Tomás Manzaneque, Victor Ruiz, José Luis Sánchez-Rojas, Achim Bittner, Ulrich Schmid
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630W (2013) https://doi.org/10.1117/12.2017131
J. Iannacci, M. Gottardi, E. Serra, R. Di Criscienzo, A. Borrielli, M. Bonaldi
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630X (2013) https://doi.org/10.1117/12.2016766
Bio-MEMS
Vladimir T. Stavrov, Assen A. Shulev, Chavdar M. Hardalov, Vencislav M. Todorov, Ilia R. Roussev
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630Y (2013) https://doi.org/10.1117/12.2017368
Sebastian Busch, Manuel Ketterer, Xenia Vinzenz, Christian Hoffmann, Jürgen Wöllenstein
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87630Z (2013) https://doi.org/10.1117/12.2017434
M. Crepaldi, A. Chiolerio, T. Tommasi, D. Hidalgo, G. Canavese, S. Stassi, D. Demarchi, F. C. Pirri
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876311 (2013) https://doi.org/10.1117/12.2017553
Poster Session
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876312 (2013) https://doi.org/10.1117/12.2016928
Jörg Encke, Wilfried Hortschitz, Andreas Kainz, Harald Steiner, Franz Keplinger, Thilo Sauter
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876315 (2013) https://doi.org/10.1117/12.2017405
Sebastian W. Schmidt, Johann Foucher, Christian Penzkofer, Bernd Irmer
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876316 (2013) https://doi.org/10.1117/12.2017430
Monika Leester-Schädel, J.-W. Thies, T. Schubert, S. Büttgenbach, A. Dietzel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876317 (2013) https://doi.org/10.1117/12.2016877
Yiqiang Fan, Huawei Li, David Conchouso, Ian G. Foulds
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876318 (2013) https://doi.org/10.1117/12.2015509
S. Cardoso, L. Gameiro, D. C. Leitao, F. Cardoso, R. Ferreira, E. Paz, P. P. Freitas
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631A (2013) https://doi.org/10.1117/12.2018070
Dietmar Puchberger-Enengl, Mireille Bipoun, Martin Smolka, Christian Krutzler, Franz Keplinger, Michael J. Vellekoop
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631B (2013) https://doi.org/10.1117/12.2018088
M. Smolka, D. Puchberger-Enengl, M. Bipoun, G. Fercher, A. Klasa, C. Krutzler, F. Keplinger, M. J. Vellekoop
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631C (2013) https://doi.org/10.1117/12.2018098
Maher Matar, Alaaldeen T. Al-Halhouli, Stephanus Büttgenbach, Andreas H. Dietzel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631D (2013) https://doi.org/10.1117/12.2018216
Z. Hadas, V. Vetiska, Z. Ancik, C. Ondrusek, V. Singule
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631F (2013) https://doi.org/10.1117/12.2017126
P. Tsampas, G. Roditis, V. Papadimitriou, P. Chatzakos, Tat-Hean Gan
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631G (2013) https://doi.org/10.1117/12.2017255
N. Jackson, R. O'Keeffe, M. O'Neill, F. Waldron, A. Mathewson
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631I (2013) https://doi.org/10.1117/12.2016469
Gyorgy D. Szarka, Plamen P. Proynov, Bernard H. Stark, Stephen G. Burrow
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631J (2013) https://doi.org/10.1117/12.2016536
D. Blažević, E. Kamenar, S. Zelenika
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631K (2013) https://doi.org/10.1117/12.2016870
Juris Blums, Galina Terlecka, Ilgvars Gornevs, Ausma Vilumsone
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631L (2013) https://doi.org/10.1117/12.2016995
Z. Ancik, R. Vlach, L. Janak, P. Kopecek, Z. Hadas
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631M (2013) https://doi.org/10.1117/12.2017134
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631N (2013) https://doi.org/10.1117/12.2017311
M. Dini, M. Filippi, A. Romani, V. Bottarel, G. Ricotti, M. Tartagni
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631O (2013) https://doi.org/10.1117/12.2017406
M. Colin, S. Basrour, L. Rufer
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631P (2013) https://doi.org/10.1117/12.2017439
Naser Koshro Pour, Maher Kayal, Guobin Jia, Bjoern Eisenhawer, Fritz Falk, Adrian Nightingale, John C. DeMello, Yordan M. Georgiev, Nikolay Petkov, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631Q (2013) https://doi.org/10.1117/12.2017520
Ali B. Alamin Dow, Achim Bittner, Ulrich Schmid, Nazir P. Kherani
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631S (2013) https://doi.org/10.1117/12.2017814
Martin Kasemann, Karola Rühle, Karim M. Gad, Stefan W. Glunz
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631T (2013) https://doi.org/10.1117/12.2018052
Yannick Verbelen, An Braeken, Abdellah Touhafi
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631U (2013) https://doi.org/10.1117/12.2018490
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631X (2013) https://doi.org/10.1117/12.2017066
Tobias Pössinger, Christian Bolzmacher, Laurence Bodelot, Nicolas Triantafyllidis
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631Y (2013) https://doi.org/10.1117/12.2016532
A. Ababneh, A. N. Al-Omari, M. Marschibois, D. Feili, H. Seidel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87631Z (2013) https://doi.org/10.1117/12.2017333
C. R. Bowen, V. Yu. Topolov, D. N. Betts, H. A. Kim
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876320 (2013) https://doi.org/10.1117/12.2017649
Hutomo Suryo Wasisto, Stephan Merzsch , Kai Huang , Andrej Stranz , Andreas Waag , Erwin Peiner
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876321 (2013) https://doi.org/10.1117/12.2016970
S. Pelegrini, A. Adami, C. Collini, P. Conci, L. Lorenzelli, A. A. Pasa
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876322 (2013) https://doi.org/10.1117/12.2017238
Ali B. Alamin Dow, Ulrich Schmid, Nazir P. Kherani
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876323 (2013) https://doi.org/10.1117/12.2017716
D. Tumpold, M. Kaltenbacher, C. Glacer, M. Nawaz, A. Dehé
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876324 (2013) https://doi.org/10.1117/12.2016468
G. De Pasquale, A. Somá
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876325 (2013) https://doi.org/10.1117/12.2016771
Florian Oesterle, Franz Fink, Harald Kuhn, Alfons Dehé, Robert Weigel, Alexander Koelpin
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876326 (2013) https://doi.org/10.1117/12.2016835
Jonathan D. Adams, Christian H. Schwalb, Marcel Winhold, Maja Ðukić, Michael Huth, Georg E. Fantner
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876327 (2013) https://doi.org/10.1117/12.2018034
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876328 (2013) https://doi.org/10.1117/12.2018059
Wilfried Hortschitz, Andreas Kainz, Jörg Encke, Franz Kohl, Harald Steiner, Michael Stifter, Thilo Sauter, Franz Keplinger
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876329 (2013) https://doi.org/10.1117/12.2017628
P. Fiala, P. Drexler, D. Nespor
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632A (2013) https://doi.org/10.1117/12.2015111
Oliver Futterknecht, Mark O. Macqueen, Salmah Karman, S. Zaleha M. Diah, Ille C. Gebeshuber
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632B (2013) https://doi.org/10.1117/12.2016953
Henning Völlm, Jonathan Herrmann, Reinhard Maier, Dara Feili, Volker Häublein, Heiner Ryssel, Helmut Seidel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632C (2013) https://doi.org/10.1117/12.2017166
T. Waber, W. Pahl, M. Schmidt, G. Feiertag, S. Stufler, R. Dudek, A. Leidl
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632D (2013) https://doi.org/10.1117/12.2016459
M. Stifter, H. Steiner, A. Kainz, F. Keplinger, W. Hortschitz, T. Sauter
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632E (2013) https://doi.org/10.1117/12.2016761
Ventsislav Lavchiev, Christian Kristament, Markus Brandstetter, Georg Ramer, Bernhard Lendl, Ursula Hedenig, Thomas Grille, Peter Irsigler, Bernhard Jakoby
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632F (2013) https://doi.org/10.1117/12.2017273
Vladimir T. Stavrov, Vencislav M. Todorov, Assen A. Shulev, Chavdar M. Hardalov
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632G (2013) https://doi.org/10.1117/12.2017381
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632H (2013) https://doi.org/10.1117/12.2017425
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632K (2013) https://doi.org/10.1117/12.2018431
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632L (2013) https://doi.org/10.1117/12.2016938
Julia Fischer, Thomas Herzog, Susan Walter, Henning Heuer
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632M (2013) https://doi.org/10.1117/12.2017004
B. Mukhopadhyay, M. Fritz, P. Mackowiak, T. C. Vu, O. Ehrmann, K.-D. Lang, H.-D. Ngo
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632N (2013) https://doi.org/10.1117/12.2017159
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632P (2013) https://doi.org/10.1117/12.2017329
T. Lohse, P. Krüger, H. Heuer, M. Oppermann, H. Torlee, N. Meyendorf
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632Q (2013) https://doi.org/10.1117/12.2017384
A. Borrielli, M. Bonaldi, E. Serra, A. Bagolini, M. Boscardin, F. S. Cataliotti, F. Marin, F. Marino, A. Pontin, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632R (2013) https://doi.org/10.1117/12.2017412
Vladimir Stavrov, Franz Kohl, Thilo Sauter, Philip Philipov
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632S (2013) https://doi.org/10.1117/12.2017427
Gabriel Vanko, Peter Hudek, Johann Zehetner, Jaroslav Dzuba, Pavlina Choleva, Martin Vallo, Ivan Rýger, Tibor Lalinský
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632U (2013) https://doi.org/10.1117/12.2017499
Lutz Doering, Nicole Thronicke, Christian Löbner, Thomas Frank, Steffen Reich, Stefan Völlmeke, Arndt Steinke
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632V (2013) https://doi.org/10.1117/12.2017853
Ali B. Alamin Dow, Adel Gougam, Nazir P. Kherani, I. W. Rangelow
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632W (2013) https://doi.org/10.1117/12.2015547
W. Hansal, H. Steiner, R. Mann, M. Halmdienst, J. Schalko, F. Keplinger
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632X (2013) https://doi.org/10.1117/12.2018001
D. Dussault, E. Liebscher, F. Fournell, V. Dragoi
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632Y (2013) https://doi.org/10.1117/12.2018006
W. Haas, J. W. Bartha, W.-J. Fischer, A. Richter
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 87632Z (2013) https://doi.org/10.1117/12.2018068
J. Dunkel, F. Wippermann, A. Brückner, A. Reimann, A. Bräuer
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876330 (2013) https://doi.org/10.1117/12.2016534
A. Oerke, S. Büttgenbach, A. Dietzel
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876331 (2013) https://doi.org/10.1117/12.2017294
A. Q. A. Qureshi, L. Pelliccia, S. Colpo, J. Iannacci, P. Farinelli, B. Margesin
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876332 (2013) https://doi.org/10.1117/12.2017314
V. Ruiz-Díaz, T. Manzaneque, J. Hernando-García, A. Ababneh, M. Kucera, A. N. Al-Omari, A. Bittner, U. Schmid, H. Seidel, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876333 (2013) https://doi.org/10.1117/12.2017115
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876334 (2013) https://doi.org/10.1117/12.2017353
Yu. D. Filatov, G. Monteil, V. I. Sidorko, O. Yu Filatov
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876336 (2013) https://doi.org/10.1117/12.2016913
Hutomo Suryo Wasisto, Qing Zhang , Stephan Merzsch , Andreas Waag , Erwin Peiner
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876337 (2013) https://doi.org/10.1117/12.2017009
Mohanad Mohammed Zaki, Sandy Zähringer, Norbert Schwesinger
Proceedings Volume Smart Sensors, Actuators, and MEMS VI, 876338 (2013) https://doi.org/10.1117/12.2017411
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