Deflectometry vs. interferometry

Gerd Häusler; Christian Faber; Evelyn Olesch; Svenja Ettl

doi:10.1117/12.2020578

13 May 2013 Deflectometry vs. interferometry

Gerd Häusler, Christian Faber, Evelyn Olesch, Svenja Ettl

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87881C (2013) https://doi.org/10.1117/12.2020578
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Quantitative deflectometry is a new tool to measure specular surfaces. The spectrum of measurable surfaces ranges from flat to freeform surfaces with steep slopes, with a size ranging from millimeters to several meters. We illustrate this by several applications: eye glass measurements, measurements of big mirrors, and in-line measurements in ultra-precision manufacturing without unclamping of the sample. We describe important properties of deflectometry and compare its potentials and limitations with interferometry. We discuss which method is superior for which application and how the potential of deflectometry may be developing in the future.

Citation Download Citation

Gerd Häusler, Christian Faber, Evelyn Olesch, and Svenja Ettl "Deflectometry vs. interferometry", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881C (13 May 2013); https://doi.org/10.1117/12.2020578

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