Dual resolution imaging for metrology applications

Kevin Harding; Dan Gray

doi:10.1117/12.2023525

6 September 2013 Dual resolution imaging for metrology applications

Kevin Harding, Dan Gray

Author Affiliations +

Proceedings Volume 8839, Dimensional Optical Metrology and Inspection for Practical Applications II; 883905 (2013) https://doi.org/10.1117/12.2023525
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Many applications require a fine measurement to be made over a small area, but with reference to a much larger area. The ability to inspect a large surface, then to zoom in to a small area is valuable in many applications ranging from bridges to turbines. However, the need to switch lenses or re-point a lens can make such inspection cumbersome. This paper discusses an optical method that permits an instantaneous switch from a wide view to a close up of any area within that wide view, without the need to change lenses or repoint the optical system. We will discuss the possible application of the method, as well as the limitations inherent to the concept.

Citation Download Citation

Kevin Harding and Dan Gray "Dual resolution imaging for metrology applications", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 883905 (6 September 2013); https://doi.org/10.1117/12.2023525

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